AVE VCR 322 PLUS Instrukcja Obsługi

vacuum technologies tqna49e1 (2010-05) 1 Capacitance Diaphragm Gauge CDG-500 Instruction Manual Incl. EC Declaration of Conformity

10 tqna49e1 (2010-05) Switching functions SP1, SP2 Setting range 0 … +10 V Hysteresis 1% F.S. Relay contact 30 VDC / ≤0.5 ADC floating (n.o.) c

tqna49e1 (2010-05) 11 Current consumption <500 mA (max. starting current) Power consumption (depending on supply voltage) ≤1 W Fuse requi

12 tqna49e1 (2010-05) Admissible temperatures Storage Operation Bakeout (not in operation) –40 °C … +65 °C +5 °C … +50 °C ≤110 °C at the flange

tqna49e1 (2010-05) 13 Analog Measuring Signal vs. Pressure 1234567891000.9×F.S.0.5×F.S.0.6×F.S.1.0×F.S.0.7×F.S.0.8×F.S.0.1×F.S.0.2×F.S.0.3×F.S

14 tqna49e1 (2010-05) 3 Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product

tqna49e1 (2010-05) 15 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the ev

16 tqna49e1 (2010-05) Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep conden-sates and parti

tqna49e1 (2010-05) 17 3.2 Power Connection Make sure the vacuum connection is properly made (→  14). DANGER The gauge may only be connect

18 tqna49e1 (2010-05) n If no sensor cable is available, make one according to the following diagram. 15891D-Sub,15-pinfemalesolderingsideElect

tqna49e1 (2010-05) 19 4 Operation Put the gauge into operation. If you are using an VARIAN con-troller, define the measurement range (→  [1]).

2 tqna49e1 (2010-05) Product Identification In all communications with VARIAN, please specify the infor-mation given on the product nameplate. F

20 tqna49e1 (2010-05) 4.2 Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Report

tqna49e1 (2010-05) 21 4.2.1 <ZERO> Adjustment n Evacuate the gauge to a pressure according to the table below: F.S. Recommended final

22 tqna49e1 (2010-05) After zero adjustment the gauge automatically returns to measurement mode. The <RUN> LED lits. The zero can also

tqna49e1 (2010-05) 23 max. ø1.1 mmKeep the button depressed p Push the <ZERO> button again: Fine adjustment within 0...3 s: the zero a

24 tqna49e1 (2010-05) 4.3 Switching Functions The two switching functions can be adjusted to any pressure within the whole measurement range (→

tqna49e1 (2010-05) 25 4.3.1 Adjusting the Setpoints The setpoints can be adjusted via • the buttons on the gauge, • the RS232C interface (

26 tqna49e1 (2010-05) Adjusting Setpoint <1> n Push the <SP> button with a pin (max. ø1.1 mm). The gauge changes to the switching f

tqna49e1 (2010-05) 27 p Push the <ZERO> button again: Fine adjustment within 0...3 s: the zero adjustment value changes by one unit Chan

28 tqna49e1 (2010-05) 5 Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the produ

tqna49e1 (2010-05) 29 Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate.

tqna49e1 (2010-05) 3 Validity This document applies to products with the following part numbers: Gauges without switching functions Measur

30 tqna49e1 (2010-05) 6 Maintenance, Repair Under clean operating conditions, the product requires no main-tenance. Gauge failures due to con

tqna49e1 (2010-05) 31 8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before be

32 tqna49e1 (2010-05) Further Information  [1] www.varianinc.com INSTRUCTION MANUAL AGC-100 Vacuum Gauge Controller tqnb01e1 Varian Vacuum Tec

tqna49e1 (2010-05) 33 ETL Certification 3103457 ETL LISTED The product CDG-500 complies with the requirements of the following Stan-dards: UL

34 tqna49e1 (2010-05) EC Declaration of Conformity We, VARIAN, hereby declare that the equipment mentioned below complies with the provisions of

tqna49e1 (2010-05) 35 Notes

vacuum technologies 121 Hartwell Avenue Lexington, MA, 02421 USA Tel: (781) 861 7200 Fax: (781) 861 5437 [email protected] t qna49e1 www.var

4 tqna49e1 (2010-05) Gauges with two switching functions Measurement range, Full Scale (F.S.) Part number Flange Torr Pascal mbar CDG500T

tqna49e1 (2010-05) 5 Intended Use The Capacitance Diaphragm Gauge CDG-500 is intended for absolute pressure measurement of gases in its respect

6 tqna49e1 (2010-05) Contents Product Identification 2 Validity 3 Intended Use, Function 5 Trademark, Patents 5 Scope of Delivery 5 1 Saf

tqna49e1 (2010-05) 7 1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventi

8 tqna49e1 (2010-05) 1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the process

tqna49e1 (2010-05) 9 2 Technical Data Measurement range → "Validity" Accuracy 1) 0.20% of reading Temperature effect on zero ≥10 To